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Wet Bench Design & Manufacture

Wet Bench Design & Manufacture Services

A wet bench is a fully-automated or semi-automated process tool typically used to carry out wet cleaning and etching operations in semiconductor manufacturing. They can be designed for acid or solvent processing. Benches commonly include several tanks (or modules/baths) each containing either cleaning or etching solutions and DI (deionized) water in a rinsing tank. Semiconductor wafers, or other substrates, usually in lot sizes of 25, are immersed in a predetermined sequence. A drying module is often included in a wet bench. Nanosil, LLC can custom design wet benches for any system configuration or requirement.